By Humberto Campanella
This groundbreaking booklet offers you a entire figuring out of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical approach) resonators. For the 1st time wherever, you discover large insurance of those units at either the know-how and alertness degrees. This sensible reference provides you with assistance in layout, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the mixing of those units with average CMOS (complementary-metal-oxide-semiconductor) applied sciences, and their program to sensing and RF platforms. additionally, this one-stop source seems to be on the major features, modifications, and obstacles of FBAR, MEMS, and NEMS units, assisting you to settle on the fitting methods in your tasks. Over 280 illustrations and greater than one hundred thirty equations help key subject matters through the e-book.
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Extra info for Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems)
The mathematical description of Lamb waves is quite complex, and due to its complexity Lamb waves have not been systematically explored in experimental implementations until recently. Similar but still different than Rayleigh waves, they are also often called Rayleigh-Lamb waves. 2 Acoustic Microresonators Acoustic microresonators are kind of microelectromechanical devices experiencing acoustic wave propagation and eventually vibrating at a resonance frequency related to their dimensions and mechanical properties.
The detection of resonance is carried out by optical systems (the resonance curve is shown in the inset). Electrothermal actuation implements a heating resistor located on a movable MEMS/NEMS structure. The heater dissipates the power of an electric signal flowing through it. The dissipated power is converted into heat and the MEMS experiments thermal expansion or contraction according to its mechanical configuration, temperature, and environmental conditions. Since the thermal signal follows the voltage waveform, the MEMS can be driven into resonance if the electric signal is chosen to be of a frequency corresponding to one of the MEMS eigenvalues.
First, the photo-resist is uniformly deposited on the wafer by spin coating. Then, the mask or reticule is charged in the exposure line and aligned with the wafer. 20 Conventional optical photolithography of a SiO2 pattern: (a) SiO2 layer deposition; (b) photo-resist coating; (c) mask alignment and UV exposure; (d) resist developing; (e) SiO2 etching; and (f) resist removal. 3 Key Fabrication Technologies 29 exposed to UV radiation, the molecular structure of the light-sensitive resist is broken.
Acoustic Wave and Electromechanical Resonators: Concept to Key Applications (Integrated Microsystems) by Humberto Campanella
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